Functionality of Ti-O Thin Films Doped by Phosphorus: Wettability, Semiconductor Performance and Blood Compatibility

Jin Biao Wang; Ping Yang; Gui Cai Li; Zhong Hai Yang; Yong Xiang Leng; Hong Sun; Nan Huang

doi:10.4028/www.scientific.net/MSF.610-613.1017

Paper Titles

Experimental and Theoretical Study of the Cyclic Relaxation of Die Cast Magnesium Alloy
p.991

Development of Surface Treatment in Industrial Scale for Components with Metallic Luster on AZ31 Sheets
p.999

Effect of SF₆ Cover Gas Humidity and Concentration on Efficient Protection of Molten Magnesium
p.1003

In Vitro Cytotoxicity Study of the Nano-Hydroxyapatite/Bacterial Cellulose Nanocomposites
p.1011

Functionality of Ti-O Thin Films Doped by Phosphorus: Wettability, Semiconductor Performance and Blood Compatibility
p.1017

Silicon Nitride Surface Modification and Cell Adhesion
p.1022

Improvement of Tribological Behaviour of Biomedical Nanocrystalline Titanium by Magnetron Sputtered DLC/SiC Double Layer Films
p.1026

Fabrication of Novel Cellulose/Chitosan Artificial Skin Composite
p.1034

POSS/TiO₂ Nanohybrids as Sun Protection Factors for Skin Changes Caused by Ultraviolet A Radiation
p.1039

HomeMaterials Science ForumMaterials Science Forum Vols. 610-613Functionality of Ti-O Thin Films Doped by...

Functionality of Ti-O Thin Films Doped by Phosphorus: Wettability, Semiconductor Performance and Blood Compatibility

Abstract:

For an application as biomedical materials of high performance with a good biocompatibility, the Ti-O film on Si (110) wafer substrate has been synthesize by means of unbalance reactive magnetron sputtering method and modified by phosphorus ion implantation and succeeding vacuum annealing. X-ray diffraction (XRD) results indicated that such prepared Ti-O film had a rutile structure. X-ray photoelectron spectroscopy (XPS) analysis demonstrates the effect of P ion doping. The contact angle test and sheet resistance results showed that titanium oxide film and phosphorus-doped titanium oxide film became more hydrophilic and higher conductance after annealing. The morphology and roughness of the surface have been investigated using SEM. Antithrombotic property of the titanium oxide thin film was examined by platelet adhesion tests. The results showed that the undoped Ti-O films and the P implant and annealing at 900 °C Ti-O film had good blood compatibility.