Piezoelectric PZT Thin Films on Flexible Copper-Coated Polymer Films

Abstract:

This work analyzes the processing of Pb(Zr,Ti)O3 (PZT) thin films directly on copper-coated polymer films. PZT thin film deposition was performed onto the metallized Kapton® films using a single RF plasma jet. In order to reduce the interaction of PZT and Cu during the initial growth stage, an ultrathin amorphous TiO2-x seeding layer was sputter-deposited prior to PZT deposition. The film texture was a mixture of (111)-oriented perovskite nanocrystals, rutile and pyrochlore. Topography and piezoelectric in-plane and out-of-plane response of the films were evaluated using a commercial AFM adapted for piezoforce measurements. The as-deposited films were self-polarized with polarization pointing at the surface of the sample. Polarization was switchable and a piezoelectric hysteresis was obtained.

• Periodical: Materials Science Forum (Volumes 636-637)
• Pages: 392-397
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.636-637.392
• Online since: January 2010
• Authors: Gunnar Suchaneck, O. Volkonskiy, Gerald Gerlach, Zdenek Hubička, A. Dejneka, Lubomir Jastrabik, D. Kiselev, I. Bdikin, Andréi L. Kholkin
• Keywords: Kapton® Film Substrate, Piezoresponse Force Microscopy, Plasma Jet Deposition, PZT

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