Preparation and Property of a Fe-Doped DLC Multilayer by Ion Sources

Abstract:

A novel technique has been successfully developed to grow Fe ion doped diamond-like corbon (DLC) multilayer, with the modified linear ion sources(LIS), on Si(100)substrates. The Fe ions, generated in the specially designed ion source and accompanying the argon ions were implanted into one DLC layer previously grown by pulsed arc ion plating during argon ions sputtering and etching. The Fe-DLC multilayer can be grown by alternating growth of DLC layer and Fe ion implantation. The mechanical properties of Fe-DLC films were characterized. The results show that the Fe ion implanted multilayer significantly improves its mechanical properties. As compared with the conventional DLC films. Its stress drops to 3.9 GPa from 4.5 GPa, its friction coefficient is down to 0.1 from 0.14, and its hardness remains unchanged.

• Periodical: Materials Science Forum (Volumes 654-656)
• Pages: 1908-1911
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.654-656.1908
• Online since: June 2010
• Authors: N. Ren, Z.J. Ma, D.C. Zhao, G.J. Xiao, S.H. Wu
• Keywords: Diamond-Like Carbon (DLC), Fe-Doped, Mechanical Property, Multilayer

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