Fabrication Multi-Layer Polymer Microstructures by X-Ray Lithography with Alignment

Yi Gui Li; Susumu Sugiyama

doi:10.4028/www.scientific.net/MSF.663-665.1016

Paper Titles

Evaluation of Properties of Lapped PZT Ceramics and Silicon Cantilever Based on Eutectic Bonding and Dicing Process
p.999

Fivefold Twin Center in CVD Diamond Film
p.1004

Effects of Vacancies on the Thermal Expansion of Mercury Indium Telluride Crystals
p.1008

Study on the Tri-Functional Copolymer Containing 1,3,4-Oxadiazole, Carbazole and Terbium Complex
p.1012

Fabrication Multi-Layer Polymer Microstructures by X-Ray Lithography with Alignment
p.1016

Study on the Corrosion Productions Formed on the Surface of Lanthanum Hexaboride in the Sour Gas Environments
p.1020

Synthesis of Plate-Like SrTiO₃ Particles
p.1024

Low Temperature Sintering of (Ca_0.9375Sr_0.0625)_0.25(Li_0.5Sm_0.5)_0.75TiO₃ Microwave Dielectric Ceramics
p.1028

Electrochemically Deposited Aluminum in Template of Porous Silicon Film
p.1032

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Fabrication Multi-Layer Polymer Microstructures by X-Ray Lithography with Alignment

Abstract:

Poly(methyl methacrylate)(PMMA) and Poly L-lactic acid (PLLA) are transparent and they are suitable for optical purposes. The multi-layer polymer microfabrication can be applied for a large displacement actuator and precision sensors. A new method is intruduced to generate the multi-layer polymers microstructures by X-ray lithography with alignment. The function of X-ray on polymer materials are breaking the polymer main chain and generating intermediates which can be degraded further and finally dissolved by the solvent interaction. The method for polymer micromachining by using X-ray lithography with alignment for fabrication multi-layer micro polymer structures is confirmed experimentatively.