Evaluation of Properties of Lapped PZT Ceramics and Silicon Cantilever Based on Eutectic Bonding and Dicing Process

Abstract:

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Piezoelectric sensor can produce voltage when deflected (function as an energy harvester) while piezoelectric actuator can deflect when a voltage is applied. Different device applications have different requirements on the thickness and in-plane geometry of the Lead Zirconate Titanate(PZT) piezoelectric layers and thus have their own processing difficulties. In this paper, PZT-Au-Si cantilever is fabricated by eutectic bonding and dicing process.The properties of lapped PZT ceramics and silicon cantilever is also evaluated. The PZT-Au-Si cantilever applications for both piezoelectric actuators and energy harvesters have been confirmed.

Info:

Periodical:

Materials Science Forum (Volumes 663-665)

Edited by:

Yuan Ming Huang

Pages:

999-1003

DOI:

10.4028/www.scientific.net/MSF.663-665.999

Citation:

Y. G. Li et al., "Evaluation of Properties of Lapped PZT Ceramics and Silicon Cantilever Based on Eutectic Bonding and Dicing Process", Materials Science Forum, Vols. 663-665, pp. 999-1003, 2011

Online since:

November 2010

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Price:

$35.00

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