Thin Metal Films and Multi-Layers Structure as Absorbers for Infrared Detectors

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Abstract:

As thin metal films are known to act as wide-band absorbers for infrared radiation, in this paper Ni metal films are prepared on the Ge surface of double-sided polishing, The results showed the absorbing properties of the metal layer are strongly influenced by the dielectric function of the sensor material. This paper also describes one multi-layers structure as absorber. The structure included a reflector layer of 100-nm-thick Ti (e-beam evaporation), 2-µm-thick polyimide(spin-coating), and 14.9-nm-thick Ni film (e-beam evaporation). These contain a half transmissive thin metal film, a total reflective thin metal film and a quarter-wave polyimide film. The results showed that, measured performance matches well with theoretical predictions.

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Periodical:

Materials Science Forum (Volumes 663-665)

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352-355

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November 2010

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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[1] D. Lienhard, F. Heepmann and B Ploss: Microelectronic Eng. Vol. 29 (1995), p.101.

Google Scholar

[2] A. D. Parsons and D. J. Pedder: J. Vac. Sci. Technol. A Vol. 6 (1988), p.1686.

Google Scholar

[3] W.G. Liu, J.S. Ko and W.G. Zhu: FerroelectricsVol. 263 (2001), p.19.

Google Scholar

[4] P.W. Kruse and D.D. Skatrud: Uncooled Infrared Imaging Arrays and Systems, Semiconductors and Semimetals (Academic Press Limited, New York, 1997).

DOI: 10.1016/s0080-8784(08)62688-5

Google Scholar

[5] H. Liu: Chinese Optics Letters Vol. 8 (2010), p.218.

Google Scholar

[6] S.A. Campbell: The Science and Engineering of Microelectronic Fabrication (2009), p.214.

Google Scholar