Optical Constants of Al-Doped Er2O3 Films Prepared by Radio Frequency Reactive Magnetron Sputtering
Al doped Er2O3 films were deposited on Si(001) substrates by radio frequency magnetron technique. X-ray diffraction and atomic force microscopy show the Al doped Er2O3 films obtained are amorphous and uniform. The optical constants are studied which shows a proper value of refractive index and a lower reflectivity, indicating it could be a usefully material for solar cells.
Yuan Ming Huang
Y. Y. Zhu and Z. B. Fang, "Optical Constants of Al-Doped Er2O3 Films Prepared by Radio Frequency Reactive Magnetron Sputtering", Materials Science Forum, Vols. 663-665, pp. 361-364, 2011