Optical Constants of Al-Doped Er2O3 Films Prepared by Radio Frequency Reactive Magnetron Sputtering

Yan Yan Zhu; Ze Bo Fang

doi:10.4028/www.scientific.net/MSF.663-665.361

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HomeMaterials Science ForumMaterials Science Forum Vols. 663-665Optical Constants of Al-Doped Er2O3 Films Prepared...

Optical Constants of Al-Doped Er₂O₃ Films Prepared by Radio Frequency Reactive Magnetron Sputtering

Abstract:

Al doped Er2O3 films were deposited on Si(001) substrates by radio frequency magnetron technique. X-ray diffraction and atomic force microscopy show the Al doped Er2O3 films obtained are amorphous and uniform. The optical constants are studied which shows a proper value of refractive index and a lower reflectivity, indicating it could be a usefully material for solar cells.

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Materials Science Forum (Volumes 663-665)

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361-364

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https://doi.org/10.4028/www.scientific.net/MSF.663-665.361

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November 2010

Authors:

Yan Yan Zhu, Ze Bo Fang

Keywords:

Optical Constant, Rare Earth Oxide, Solar Power

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