Optical Constants of Al-Doped Er2O3 Films Prepared by Radio Frequency Reactive Magnetron Sputtering

Abstract:

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Al doped Er2O3 films were deposited on Si(001) substrates by radio frequency magnetron technique. X-ray diffraction and atomic force microscopy show the Al doped Er2O3 films obtained are amorphous and uniform. The optical constants are studied which shows a proper value of refractive index and a lower reflectivity, indicating it could be a usefully material for solar cells.

Info:

Periodical:

Materials Science Forum (Volumes 663-665)

Edited by:

Yuan Ming Huang

Pages:

361-364

DOI:

10.4028/www.scientific.net/MSF.663-665.361

Citation:

Y. Y. Zhu and Z. B. Fang, "Optical Constants of Al-Doped Er2O3 Films Prepared by Radio Frequency Reactive Magnetron Sputtering", Materials Science Forum, Vols. 663-665, pp. 361-364, 2011

Online since:

November 2010

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Price:

$35.00

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