Effect of Heating Treatment on the Resistivity of Polycrystalline Silicon

Lei Zhang; Jia Yan Li; Hao Yang Wang; Fu Min Xu; Yi Tan

doi:10.4028/www.scientific.net/MSF.675-677.113

Paper Titles

Oxygen Reduction Reaction on Carbon Supported Ruthenium-Based Electrocatalysts in PEMFC
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Effects of Impurities Distribution on the Crystal Structure and Electrical Properties of Multi-Crystalline Silicon Ingots
p.101

Transition-Metal Impurities Removal from Metallurgical Grade Silicon by Electron Beam Injection
p.105

Resistivity Distribution Characteristics of Metallurgical Silicon Ingot after Directional Solidification
p.109

Effect of Heating Treatment on the Resistivity of Polycrystalline Silicon
p.113

Preparation of SiC_w/Al₂O₃ Composite Sheets through Gel-Tape-Casting Process
p.119

In Situ High Resolution Transmission Electron Microscopy Studies of High Temperature Behavior of Surface Al₂O₃ Thin Layer on an AlN Particle
p.123

Rapid Synthesis of Molybdenum Disilicide by High-Energy Ball Milling
p.127

Effects of CaB₂O₄ Content on the Sintering Behavior of Hexagonal Boron Nitride
p.131

HomeMaterials Science ForumMaterials Science Forum Vols. 675-677Effect of Heating Treatment on the Resistivity of...

Effect of Heating Treatment on the Resistivity of Polycrystalline Silicon

Abstract:

Effect of heat treatment in atmosphere on the resistivity of polycrystalline silicon has been investigated in this paper. After heat treatment at 1050oC for 10h, there is no obvious change of the resistivity in the N-type region of polycrystalline silicon, which could be contributed to the complicated influence factors, such as more impurities content and defects. On the other hand, an obvious increase of the resistivity was observed in the P-type region which could be contributed the redistribution of Al and B in the Si-SiO2 interface. The resistivity of the P-type region increased from less than 1Ω·cm to several hundreds Ω·cm.

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Materials Science Forum (Volumes 675-677)

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113-116

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https://doi.org/10.4028/www.scientific.net/MSF.675-677.113

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February 2011

Authors:

Lei Zhang, Jia Yan Li, Hao Yang Wang, Fu Min Xu, Yi Tan

Keywords:

Heat Treatment, Polycrystalline Silicon, Resistivity

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