Microstructure and Wear-Resistant SiC Film by RF Magnetron Sputtering

K. Tian; Xiao Jing Xu; Zhen Fan; Xin Ni Hao; Dan Chen; Xi Ling Xin; Xin Lan Sheng

doi:10.4028/www.scientific.net/MSF.687.580

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Microstructure and Wear-Resistant SiC Film by RF Magnetron Sputtering
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Analysis of ZAO Thin Films by DC Reaction Magnetron Sputtereing
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Combinatorial Synthesis and Evaluation on Thermoelectric Films
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Conversion of Surface Energy and Experimental Investigation on the Self-Motion Behaviors of Liquid Droplets on Gradient Surfaces
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HomeMaterials Science ForumMaterials Science Forum Vol. 687Microstructure and Wear-Resistant SiC Film by RF...

Microstructure and Wear-Resistant SiC Film by RF Magnetron Sputtering

Abstract:

A wear-resistant SiC (silicon carbon) film on titanium substrate was prepared by magnetron sputtering technology. The film exhibits low nano-hardness of 12.1 GPa and low Young's modulus of 166.2 GPa together with superior friction/wear properties. As sliding against Si₃N₄ (silicon nitride) ball (2 mm in radius) at room temperature under Kokubo simulation body fluid condition, the film exhibited the friction coefficient of about 0.215 and the special wear rate in the order of magnitude of 10⁻⁵ mm³/ Nm even at the load of 500g without film cracking and interface delaminating. The high film-cracking and interface-delaminating resistance is due to the low hardness of the film and the good film/substrate modulus match caused by the low elastic modulus of the film.

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Periodical:

Materials Science Forum (Volume 687)

Pages:

580-584

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.687.580

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Online since:

June 2011

Authors:

K. Tian, Xiao Jing Xu, Zhen Fan, Xin Ni Hao, Dan Chen, Xi Ling Xin, Xin Lan Sheng

Keywords:

Friction and Wear, Load-Bearing Capacity, SiC Film, Simulation Body Fluid

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