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HomeMaterials Science ForumMaterials Science Forum Vol. 69The Liquid Metal Ion Source for Molecular Beam...

The Liquid Metal Ion Source for Molecular Beam Epitaxy of Silicon

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Molecular Beam Epitaxy

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Periodical:

Materials Science Forum (Volume 69)

Pages:

61-64

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.69.61

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Online since:

January 1991

Authors:

V. Avrutin, A.F. Vyatkin

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© 1991 Trans Tech Publications Ltd. All Rights Reserved

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