The Liquid Metal Ion Source for Molecular Beam Epitaxy of Silicon

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Periodical:

Edited by:

G. Minchev and L. Pramatarova

Pages:

61-64

DOI:

10.4028/www.scientific.net/MSF.69.61

Citation:

V. Avrutin and A.F. Vyatkin, "The Liquid Metal Ion Source for Molecular Beam Epitaxy of Silicon ", Materials Science Forum, Vol. 69, pp. 61-64, 1991

Online since:

January 1991

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$35.00

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