Experimental Research and Analysis on Micro Electrode Fabricated by Electrochemical Etching

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Abstract:

Electrochemical etching is a perfect method to fabricate micro cylinder electrode, but there is deviation on its precision because the tapered error of the electrode occurs. In this paper, we make some experiment and simulation analysis about the error so as to find out the influencing factors and to seek some effective solutions.

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686-689

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July 2011

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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