Experimental Research and Analysis on Micro Electrode Fabricated by Electrochemical Etching

Abstract:

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Electrochemical etching is a perfect method to fabricate micro cylinder electrode, but there is deviation on its precision because the tapered error of the electrode occurs. In this paper, we make some experiment and simulation analysis about the error so as to find out the influencing factors and to seek some effective solutions.

Info:

Periodical:

Edited by:

Ran Chen

Pages:

686-689

DOI:

10.4028/www.scientific.net/MSF.694.686

Citation:

H. B. Wang et al., "Experimental Research and Analysis on Micro Electrode Fabricated by Electrochemical Etching", Materials Science Forum, Vol. 694, pp. 686-689, 2011

Online since:

July 2011

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Price:

$35.00

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