The early stages of the scale growth process were studied of two FeCrAl alloys: one synthetic (Fe23Cr5Al) and one commercial (Kanthal APM alloy). In addition, Yttrium was implanted to the Fe23Cr5Al alloy. Oxidation exposures were carried out at 1000°C using two-stage-oxidation exposures in atmospheres containing significantly different amounts of 18O2-tracer. The scales were analyzed in terms of SIMS, PLS and SEM. The distribution of oxygen isotopes which corresponded to the location of new oxide formation, the scale phase composition, scale morphology and microstructure were determined which enabled description of the scale evolution on all studied alloys. Similar evolution stages were observed, but minor differences were related to the rate of disappearing of the transient aluminium oxides.