Preparation, Characterization and No_x Sensing Characteristics of Sensor Grade CuInO₂ Thin Films

Abstract:

CuInO₂ phase, a p-type semi-conducting oxide was successfully stabilized in thin film form by pulsed laser deposition technique and the deposition parameters were optimized. The gas sensing studies carried out on thin film of CuInO₂ for different concentrations of NO_x exhibited a decrease in resistance, a characteristic of p-type semiconductor. The thin film responded to 4 vppm of NO_x in air. The CuInO₂ thin film did not respond to trace levels of hydrogen, ammonia and petroleum gas at this operating temperature and thus offering selectivity to NO_x.

• Periodical: Materials Science Forum (Volume 710)
• Pages: 727-732
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.710.727
• Online since: January 2012
• Authors: E. Prabhu, K.I. Gnanasekar, V. Jayaraman, T. Gnanasekaran
• Keywords: Analyte Gas, Resistance, Selectivity, Semi-Conducting Oxide, Sensitivity, Thin Film

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