Modeling of I-, T- and V-Shaped Microcantilevers for Environmental Monitoring

Abstract:

This paper describes a model of microcantilever to determine the optimal dimensions that can be used for environmental monitoring. Three types, which are usually used i.e., I-, T- and V-shaped microcantilevers, are considered. The microcantilevers work in dynamic mode in which their resonance frequencies depend on both spring constant and effective mass. It can be seen that the spring constant and effective mass of the microcantilever change when the structure is changed even the size is same. In consequent, the sensor sensitivity is also found to be different each other. The V-shaped microcantilever is more sensitive than I- and T-shaped ones. Moreover, the simulation results show that the microcantilever with sizes of length 10 µm, width 5 µm and thickness 100 nm is good enough to detect molecule gas with the mass of less than femtogram.

• Periodical: Materials Science Forum (Volume 737)
• Pages: 119-125
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.737.119
• Online since: January 2013
• Authors: Ratno Nuryadi
• Keywords: Environmental Monitoring, Mass Sensitivity, Microcantilever (I-, T-, V-Shapes), Resonance Frequency, Simulation

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