Highly Sensitive Room Temperature Hydrogen Sensors Based on Photochemically Deposited SnO₂

Abstract:

Highly sensitive room temperature hydrogen sensors based on undoped and Fe-doped SnO₂ films were fabricated. The SnO₂ films were deposited by the photochemical deposition using an aqueous solution containing SnSO₄. For deposition of doped and undoped SnO₂ films, a small amount of an aqueous solution was dropped on a glass substrate and irradiated by UV light. The sensors annealed at 200oC showed extremely high sensitivity to hydrogen, but the initial resistance was very high. The sensors annealed at 400oC had a much lower resistance, and thus the sensor response was able to be measured even by a pocket multimeter. The Fe-doped sample showed higher sensitivity compared with the undoped sample.

• Periodical: Materials Science Forum (Volume 787)
• Pages: 378-382
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.787.378
• Online since: April 2014
• Authors: Masaya Ichimura*, Dengbaoleer Ao
• Keywords: Gas Sensor, Hydrogen, Photochemical Deposition, SnO₂

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