High-Frequency Performance of Co₂FeAl Half-Metallic Films Prepared by Oblique Sputtering under Various Deposition Conditions

Abstract:

Co₂FeAl full-Hesuler alloys show good soft magnetic properties, implying a promising high ferromagnetic resonance frequency. In this study, Co₂FeAl films were deposited on Si (100) substrates using an oblique sputtering method. As expected, a good high-frequency performance was achieved in the as-deposited Co₂FeAl films without any annealing. An obvious uniaxial magnetic anisotropy over 200 Oe with the magnetic hard axis along the radial direction of the sample turntable was obtained. As a result, the self-bias ferromagnetic resonance frequency reaches more than 4 GHz for the Co₂FeAl films prepared under an integrated circuits compatible process. These results indicate that the Co₂FeAl films are promising in integrated circuits RF/microwave devices.

• Periodical: Materials Science Forum (Volume 787)
• Pages: 368-372
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.787.368
• Online since: April 2014
• Authors: Zhi Yi Cai*, Shan Dong Li, Xiao Qin Cao, Hong Lei Du, Qian Xue, Xiao Yang Gao, Shi Ming Xie
• Keywords: Ferromagnetic Resonance, Heusler Alloy, High-Frequency Ferromagnetic Film, Oblique Sputtering

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