Application of Low Voltage in Quantitative Analysis by Energy Dispersive Spectrum (EDS)

Wei Wu; Zi Wei Liu; Chu Cheng Lin; Jia Jie Hua; Yi Zeng

doi:10.4028/www.scientific.net/MSF.804.165

Paper Titles

Effect of Carbon Pre-Treatment on Pd Dispersion in Synthesis of Pd/C Catalyst
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Temperature Dependence of Magnetic Properties in Ferrite Powders by High Energy Ball Milling
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Self-Cleaning TiO₂/SiO₂ Thin Film Prepared by a Simple Sol-Gel Method
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Development of a Carbon Nanotube Paste for the High-Performance Field Emitters by Using the Simple Ball-Milling Method
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Application of Low Voltage in Quantitative Analysis by Energy Dispersive Spectrum (EDS)
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Surface Modification of CaCO₃ Micro/Nanofillers by Pimelic Acid: Consequences on Crystallization Behaviors of Polypropylene Composites
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Synthesis and Characterization of Cu–TiC Nanocomposites by Ball Milling and Spark Plasma Sintering
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Crack-Healing Function of Nano-Ni/(ZrO₂+Al₂O₃) Hybrid Materials
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Fabrication and Fracture Characteristics of AlN/Ni Laminated Composites
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HomeMaterials Science ForumMaterials Science Forum Vol. 804Application of Low Voltage in Quantitative...

Application of Low Voltage in Quantitative Analysis by Energy Dispersive Spectrum (EDS)

Abstract:

By scanning electron microscope equipped (SEM) with energy dispersive spectroscopy (EDS) accessory, analysis can be performed simultaneously in the samples’ micromorphology observation and micro composition test. At present, EDS analysis is generally used high acceleration voltage, and the diffusion range of the incident electrons in sample is 3-5 μm. Therefore, the minimum area for the component analysis is several micrometers. The diffusion range of incident electrons can be reduced by reducing the acceleration voltage, and as a result, the nanometer-scale composition analysis in SEM can be achieved. Based on Monte Carlo simulation method, the incident electrons practical effect range can be estimated. While the acceleration voltage is reduced, X-ray yield rates of the B, C, N, O and other light elements will be increased. Thereby the measuring precision of EDS quantitative analysis of light elements can be improved.