Anti-Corrosion Property of Atomic Layer Deposition Films for Anodized Aluminum

Yi Jia; Mang Yang; Wei Er Lu; Feng Ji; Chao Bo Li; You Tong Fang; Yang Xia

doi:10.4028/www.scientific.net/MSF.809-810.689

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HomeMaterials Science ForumMaterials Science Forum Vols. 809-810Anti-Corrosion Property of Atomic Layer Deposition...

Anti-Corrosion Property of Atomic Layer Deposition Films for Anodized Aluminum

Abstract:

Single and multilayer of Al₂O₃ and TiO₂ were fabricated on anodized aluminum by atomic layer deposition. The effect of processing parameters on pore sealing and anti-corrosion property was studied. It is concluded that the micropores on anodized aluminum could be sealed by atomic layer deposition oxide films through SEM and staining experiments. The anti-corrosive property is affected mainly by the film thickness and process temperature. The acidic drip and salt spray test shows that the anti-corrosion property is enhanced as the film thickness increase. With the similar thickness, Al₂O₃/TiO₂ multilayer film has the best anti-corrosion property, while the single Al2O3 layer appears the poorest. The complementary roles between two basic materials result in the enhanced application property.

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Materials Science Forum (Volumes 809-810)

Pages:

689-694

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.809-810.689

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Online since:

December 2014

Authors:

Yi Jia, Mang Yang, Wei Er Lu, Feng Ji, Chao Bo Li, You Tong Fang, Yang Xia*

Keywords:

Al₂O₃, Anti-Corrosion, Atomic Layer Deposition, Sealing, TiO₂

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