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HomeMaterials Science ForumMaterials Science Forum Vol. 852The Influence of C2H2 Flow Rate on the...

The Influence of C₂H₂ Flow Rate on the Composition, Structural and Properties of the Ni/α-C:H Films Deposited by FCVA

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Abstract:

Nickel/carbon nanocomposite films with different C₂H₂ flow rate were deposited by filtered cathodic vacuum arc (FCVA) device. The composition and nanostructure of the films were investigated by X-ray diffraction (XRD), Raman scattering spectroscopy, X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). The grain size increase from 8.7 nm at the C₂H₂ flow rate of 10 sccm to the maximum of 11.5 nm at 30 sccm, after that it decrease. The mean phase separation is in the range of 0.2-2.6 nm. The hardness of 21.6 Gpa was obtained at 50sccm.

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Periodical:

Materials Science Forum (Volume 852)

Pages:

1132-1139

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.852.1132

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Online since:

April 2016

Authors:

Han Zhou, Qing Yan Hou, Tian Qing Xiao, Bin Liao, Xian Ying Wu, Xu Zhang*

Keywords:

C₂H₂ Flow Rate, Filtered Arc, Nanocomposite, Nickel

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© 2016 Trans Tech Publications Ltd. All Rights Reserved

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