Study on Ultraprecision Polishing of Sapphire – Effects of Crystal Orientation on Polishing Characteristics

Mutsumi Okada; Hirofumi Suzuki; Toshikazu Suzuki; Yasuo Higashi; Shinobu Aoyagi

doi:10.4028/www.scientific.net/MSF.874.151

Paper Titles

Effect of Media Degradation on Finishing Characteristics in Abrasive Flow Machining
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Surface Finishing on Arc-Shaped Inner Surface by Ultraviolet Assisted Polishing
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Mirror-Like Surface Finishing of PCD by Fixed Abrasive Polishing
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Feasibility of Magnetocaloric Application in the Machining Processes
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Study on Ultraprecision Polishing of Sapphire – Effects of Crystal Orientation on Polishing Characteristics
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Experimental Research of Cluster Magnetorheological Finishing on Anodic Oxide Film of Aluminum
p.158

A Novel TEM Sample Preparation by Using Micro Magnetorheological Finishing
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Experimental Research on Dressing Parameters of the Plate in Planetary Double-Sided Grinding Process
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Estimation of Unsteady and Steady Polishing Force in Magnetic Abrasive Finishing Using a Permanent Magnet End-Mill Tool
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HomeMaterials Science ForumMaterials Science Forum Vol. 874Study on Ultraprecision Polishing of Sapphire –...

Study on Ultraprecision Polishing of Sapphire – Effects of Crystal Orientation on Polishing Characteristics

Abstract:

In the telescopic interferometer KAGRA (Large-scale Cryogenic Gravitational wave Telescope), the ultraprecision mirror made of sapphire (α-alumina) is required to polish. The focal length of the mirror is 7 km and it must be finished by polishing after grinding. In order to polish the mirror precisely, polishing characteristics of the sapphire must be researched. In this study, the polishing characteristics are examined and the dependence of the crystal orientation on the polishing rates is studied. In the experiments, sapphire wafer is polished by using rotational small tool and SiO₂ abrasives.

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Periodical:

Materials Science Forum (Volume 874)

Pages:

151-157

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.874.151

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Online since:

October 2016

Authors:

Mutsumi Okada*, Hirofumi Suzuki, Toshikazu Suzuki, Yasuo Higashi, Shinobu Aoyagi

Keywords:

Chemical Mechanical Polishing, Crystal Orientation, Polishing Rate, Sapphire

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References

[1] T. SUZUKI: Report of the plan for Large-scale Cryogenic Gravitational wave Telescope LCGT, Proceedings of 12th KEK Mechanical Engineering Workshop and the 3rd Meeting of Advanced Accelerator Technologies, (2011) p.399.

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[2] T. SUZUKI: Report of the junction technology for sapphire mirror suspension of the telescopic interferometer KAGRA (Large-scale Cryogenic Gravitational wave Telescope), Proceedings of 12th KEK Mechanical Engineering Workshop and the 3rd Meeting of Advanced Accelerator Technologies, (2011).

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