A Novel TEM Sample Preparation by Using Micro Magnetorheological Finishing

Hu Luo; Shao Hui Yin; Feng Jun Chen

doi:10.4028/www.scientific.net/MSF.874.167

Paper Titles

Mirror-Like Surface Finishing of PCD by Fixed Abrasive Polishing
p.139

Feasibility of Magnetocaloric Application in the Machining Processes
p.145

Study on Ultraprecision Polishing of Sapphire – Effects of Crystal Orientation on Polishing Characteristics
p.151

Experimental Research of Cluster Magnetorheological Finishing on Anodic Oxide Film of Aluminum
p.158

A Novel TEM Sample Preparation by Using Micro Magnetorheological Finishing
p.167

Experimental Research on Dressing Parameters of the Plate in Planetary Double-Sided Grinding Process
p.172

Estimation of Unsteady and Steady Polishing Force in Magnetic Abrasive Finishing Using a Permanent Magnet End-Mill Tool
p.178

Research Status of the Pendulum High-Speed Single Grain Test
p.187

Effect of Li₂O, K₂O and ZnO on Vitrified Bond Composites for CBN Grinding Wheels
p.193

HomeMaterials Science ForumMaterials Science Forum Vol. 874A Novel TEM Sample Preparation by Using Micro...

A Novel TEM Sample Preparation by Using Micro Magnetorheological Finishing

Abstract:

A novel TEM sample preparation method is proposed in this paper, which utilizes magnetorheological finishing to thin TEM sample. It can effectively reduce subsurface damage caused by mechanical lapping. A magnetorheological polishing tool is designed to meet TEM sample thinning requirements. Thinning testis conducted on Φ3mm single crystal silicon. Polished surface is observed by using transmission electron microscope, and high-resolution microscopy image of single crystal silicon can be achieved.

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Periodical:

Materials Science Forum (Volume 874)

Pages:

167-171

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.874.167

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Online since:

October 2016

Authors:

Hu Luo*, Shao Hui Yin, Feng Jun Chen

Keywords:

Excitation Device, MRF (Magnetorheological Finishing), Sample Preparation, TEM (Transmission Electron Microscope)

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