Characterisation of the Femtosecond Laser Micro-Grooving Process for Germanium Substrates

Lin Li; Jun Wang; Huai Zhong Li

doi:10.4028/www.scientific.net/MSF.874.291

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HomeMaterials Science ForumMaterials Science Forum Vol. 874Characterisation of the Femtosecond Laser...

Characterisation of the Femtosecond Laser Micro-Grooving Process for Germanium Substrates

Abstract:

An experimental study is reported to characterise the femtosecond (FS) laser grooving process for Germanium (Ge) substrates. The effects of process parameters, including laser fluence, pulse repetition rate and scan speed, on the groove characteristics, material removal rate (MRR) and heat affected zone (HAZ) size are discussed. It is shown that with properly selected process parameters, high quality micro-grooves can be obtained on Ge wafers. Recommendations are finally made on the selection of the most appropriate process parameters for FS micro-grooving of Ge substrates.

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Periodical:

Materials Science Forum (Volume 874)

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291-296

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.874.291

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Online since:

October 2016

Authors:

Lin Li, Jun Wang*, Huai Zhong Li

Keywords:

Femtosecond Laser, Germanium, Grooves, Micro-Machining

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