Miniaturized Laser Power Sensor via Rapid Phototyping

Sylvio Schneider; Harald Beyer; Karsten Lange; Werner Bohmeyer; Mauro Casalboni; Maria Richetta; Andreas H. Foitzik

doi:10.4028/www.scientific.net/MSF.879.1721

Paper Titles

Usability of Ti6Al4V Powder via Hydride-Dehydride Process for Selective Laser Melting Process
p.1698

GaN Thin-Film-Depositions on Glass and Amorphous-SiO₂-Layer-Deposited Si Single-Crystalline Substrates
p.1703

Influence of Different pH and Fluoride Addition on the Corrosion Behavior of the Sintered CoCr Alloy Ceramill Sintron Compared to the Cast Alloy Girobond NB
p.1709

Liquid Composite Molding: A Widely Used Group of FRPC Processing Techniques, but still a Challenging Topic
p.1715

Miniaturized Laser Power Sensor via Rapid Phototyping
p.1721

Influence of Corrosive Conditions on the Mechanical Performance of Flow Drill Screw Joints between Light Metals
p.1725

Calculation of the Stress Interaction between Dislocation Pile-Ups in Neighbouring Misoriented Grains
p.1731

High-Pressure Synthesis of Skutterudite-Type Thermoelectric Materials
p.1737

Development of Joining Method between Zircaloy and SiC/SiC Composite Tubes by Using Diode Laser
p.1743

HomeMaterials Science ForumMaterials Science Forum Vol. 879Miniaturized Laser Power Sensor via Rapid...

Miniaturized Laser Power Sensor via Rapid Phototyping

Abstract:

This work presents a photolithographic rapid prototyping process for producing thin films ("Rapid Phototyping"). This process allows a quick and cost-effective generation of scalable thermopile microstructures using commercial equipment and materials. Structural widths of 100x250μm can be produced reproducible in a lift-off process with an accuracy of 5 microns vertically and 30 microns horizontally.