Effect of Temperature on the Microstructure and Electrical Conductivity of Microcrystalline Si Films

Hua Cheng; Di Wang; Feng Li Li

doi:10.4028/www.scientific.net/MSF.895.28

Paper Titles

Microstructure Evolution and Macro Segregation of Directionally Solidified Hypoeutectic and Hypereutectic Lead-Tin Alloys
p.3

Modelling of Tensile Behaviour of NiTinol SMA Wire by Finite Element Analysis
p.8

The Influence of γ/γ′ Morphology on the Rafting and Stress Distribution of Nickel-Based Superalloys Loaded in [0 0 1] Direction
p.14

Effect of Ge Thin Layer Position on Formation and Property of CZTSSe Thin Films and Solar Cells Prepared by Sputtering Method
p.23

Effect of Temperature on the Microstructure and Electrical Conductivity of Microcrystalline Si Films
p.28

Physico-Chemical Properties of CuO Thin Films Deposited by Spray Pyrolysis
p.33

Measurement of Nonlinear Properties for PEI Tetra Sulfonated Indium Phthalocyanine Compounds Self-Assembly Film Using Improved Tophat Z-Scan Technique
p.37

Thin-Walled Composite and Plastic Shells for Civil and Industrial Buildings and Erections
p.45

A Possible Correlation Investigation between Young's Modulus and Thermal Properties of Green Composites
p.52

HomeMaterials Science ForumMaterials Science Forum Vol. 895Effect of Temperature on the Microstructure and...

Effect of Temperature on the Microstructure and Electrical Conductivity of Microcrystalline Si Films

Abstract:

Micro-Si films were deposited using Ar diluted SiH₄ gaseous mixture by electron cyclotron resonance plasma-enhanced chemical vapor deposition (ECR-PECVD). The effects of the substrate temperature on microstructure and electrical conductivity of micro-Si film were investigated. The results show that, with the increasing of substrate temperature, crystallinity and grain size increased monotonously, of which a competing balance would determine the electrical conductivity of micro-Si films. Based on these results, relatively small grain size and appropriate crystallinity would be beneficial to improve the electrical properties of micro-Si films.

You might also be interested in these eBooks

Material Engineering and Smart Materials

View Preview

Info:

Periodical:

Materials Science Forum (Volume 895)

Pages:

28-32

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.895.28

Citation:

Cite this paper

Online since:

March 2017

Authors:

Hua Cheng*, Di Wang, Feng Li Li

Keywords:

Electrical Conductivity, Micro-Si Film, Microstructure, Substrate Temperature

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

* - Corresponding Author

References

[1] A. Fontcuberta i Morral, J. Bertomeu, and P. Roca i Cabarrocas: Materials Science and Engineering, Vol. B69–70 (2000), p.559–563.

DOI: 10.1016/s0921-5107(99)00324-4

Google Scholar

[2] Michio Kondo, Makoto Fukawa, and Lihui Guo: Journal of Non-Crytalline Solids, Vol. 266-269 (2000) , pp.84-89.

Google Scholar

[3] Rui Huang, Xuanying Lin, and Wenyong Huang: Thin Solid Films, Vol. 513 (2006), pp.380-384.

Google Scholar

[4] M. Zhu, Y. Cao, and X. Guo: Solar Energy Materials & Solar Cells, Vol. 62 (2000), p.109.

Google Scholar

[5] M. Kondo, Y. Toyoshima, and A. Matsuda: J. Appl. Phys., Vol. 80 (1996), p.6061.

Google Scholar

[6] N. H. Nickel: Journal of Non-Crystalline Solids, Vol. 198-200 (1996), pp.46-51.

Google Scholar

[7] T. Su, P. C. Taylor: Physical Review Letters, Vol. 89 (2002), pp.0155021-1.

Google Scholar

[8] N.H. Nickel, N. M. Johnson, and J. Walker: Physical Review Letters, Vol. 75 (1995), p.3722.

Google Scholar

[9] Madhusudan Jana, Debajyoti Das, and A.K. Barua: Solar Energy Materials & Solar Cells, Vol. 74 (2002) , p.407–413.

DOI: 10.1016/s0927-0248(02)00121-6

Google Scholar

[10] Debajyoti Das, Madhusudan Jana, and A. K. Barua: Journal of Applied Physics, Vol. 89 (2001) , pp.3041-3048.

Google Scholar

[11] Cheng Hua and Wu Aimin: Journal of Material Science and Technology, Vol. 24 (2008), pp.690-692.

Google Scholar

[12] Milton Ohring: Materials Science of Thin Films, 2nd ed., New Jersey, Elsevier (Singapore) Pte Ltd., 2002, p.327.

Google Scholar

[13] Atif Mossad Ali: Journal of Non-crystalline Solids, Vol. 352 (2006), pp.3126-3133.

Google Scholar

[14] Madhumita Nath, P. Roca i Cabarrocas, and E.V. Johnson: Thin Solid Films, Vol. 516 (2008), pp.6974-6978.

DOI: 10.1016/j.tsf.2007.12.052

Google Scholar

[15] G. Y. Hu, R. F. O' Connel, and Y. L. He: Journal of Applied Physics, Vol. 78(1995), pp.3945-3948.

Google Scholar