A Novel Approach for the Recycling and Reusing of Silicon Slurry Waste

Abstract:

In silicon wafer manufacturing for solar cells, the hazardous sawing waste results in serious environmental problems. In this paper, a novel approach for the recycling and reusing of slurry waste is reported. The results show that slurry waste is recycled and reused completely, and composite material of Si₃N₄-Si₂N₂O-SiC is prepared. The residual gas from oxygen enrich gas production is used, which reduced cost effectively. In addition, the reaction is exothermic, which is also energy saving and ensure the production to be continuous without external heat source. The mechanism was also discussed in this paper.

• Periodical: Materials Science Forum (Volume 944)
• Pages: 1234-1239
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.944.1234
• Online since: January 2019
• Authors: He Long Hu*, Hai Bin Li, Wen Jun Yu, Yong Zhen Jiao, Ting Yi Dong, Bao Guo Lv, Jia Lin Sun
• Keywords: Reuse, Silicon Nitride, Silicon Oxynitride, Slurry Waste

References

[1] Takeuchi M, Sakamoto Y, Niwa S. Study on CO2 global recycling system. Sci Total Environ. 2001; 277: 15-19.

DOI: 10.1016/s0048-9697(01)00830-0

[2] Klugmann-Radziemska E, Ostrowski P. Chemical treatment of crystalline silicon solar cells as a method of recovering pure silicon from photovoltaic modules. Renew Energ. 2010; 35: 1751-1759.

DOI: 10.1016/j.renene.2009.11.031

[3] Sarti D, Einhaus R. Silicon feedstock for the multi-crystalline photovoltaic industry. Sol Energ Mat Sol C. 2002; 72: 27-40.

DOI: 10.1016/s0927-0248(01)00147-7

[4] Tai T. Silicon sawing waste treatment by electrophoresis and gravitational settling. J Hazard Mater. 2011; 189: 526-530.

DOI: 10.1016/j.jhazmat.2011.02.070

[5] Wang TY, Lin YC, Tai CY, et al. A novel approach for recycling of the kerf loss silicon from cutting slurry waste for solar cell application. J Cryst Growth. 2008; 310: 3403-3406.

DOI: 10.1016/j.jcrysgro.2008.04.031

[6] Wang C, Emoto H, Mitomo M. Nuclear and growth of silicon oxynitride grains in fine grained silicon nitride matrix. J Am Ceram Soc. 1998; 81: 1125-1132.

DOI: 10.1111/j.1151-2916.1998.tb02459.x

[7] Lee BT, Yoo JH, Kim HD. Size effect of raw Si powder on microstructure and mechanical properties of RBSN and GPSed-RBSN bodies. Mat Sci Eng A. 2002; 333: 306-313.

DOI: 10.1016/s0921-5093(01)01855-x

[8] Islam S, Kim M, Lee B. Fabrication and characterization of porous unidirectional Si3N2O–Si3N4 composite. Mater Lett. 2009; 63: 168-175.

[9] Lee BT, Kim HD. Effect of sintering additives on the nitridation behavior of reaction-bonded silicon nitride. Mat Sci Eng A. 2004; 364: 126-131.

DOI: 10.1016/j.msea.2003.07.005

[10] Xie RJ, Mitomo M, Kim W, et al. Texture development in silicon nitride-silicon oxynitride in situ composites via superplastic deformation. J Am Ceram Soc. 2000; 83: 3147-3152.

DOI: 10.1111/j.1151-2916.2000.tb01696.x

[11] Xie RJ, Mitomo M, Xu FF, et al. Microstructure and mechanical properties of superplastically deformed silicon nitride-silicon oxynitride in situ composites. J Eur Ceram Soc. 2002; 22: 963-971.

DOI: 10.1016/s0955-2219(01)00401-0

[12] Emoto H, Mitomo M, Wang CM, et al. Fabrication of silicon nitride-silicon oxynitride in-situ composites. J Eur Ceram Soc. 1998; 18: 527-533.

DOI: 10.1016/s0955-2219(97)00155-6

[13] Julia E F, Richard S, Gary M et al. Determination of Si2p electron attenuation lengths in SiO2. J Ele Spectro & Related Phenom. 1992; 2(60): 117-125.

[14] Kim K H, Lee J D, Kang J S, Fe3Si Phase Formation at Fe/Si(111)-7×7 Interface at Room Temperature Studied by Semiempirical Theory. JPN J Appl Phys. 1998; 37(9A): 235-241.

DOI: 10.1143/jjap.37.4949

[15] Marie D, Geoffroy D, Steydli S, et al. In-situ formation of SiC nanocrystals by high temperature annealing of SiO2/Si under CO: A photoemission study. Surf Sci. 2012; 606(7-8): 697-701.

DOI: 10.1016/j.susc.2011.12.006

[16] Haasch R T, Patscheider  J, Hellgren N, The Si3N4/TiN Interface: 2. Si3N4/TiN(001) Grown with a-7V Substrate Bias and Analyzed In situ using Angle-resolved X-ray Photoelectron Spectroscopy. Surf Sci Spectra. 2012; 19(19): 52-56.

DOI: 10.1116/11.20121003

[17] Li YL，Hu ZQ. Thermodynamic calculation of Si3N4-SiC Phase equlibrium. J Mater Sci Technol. 1995: 11: 466-468.