Analysis of MEMS Fluxgate Design for Vibration and Impact

Abstract:

The paper deals with the fluxgate transducer intended for navigation and attitude control systems for moving vehicles. The finite element modeling of the half-sine and sawtooth pulse loads of various durations is performed for the proposed fluxgate configuration with regard to the properties of materials used.

• Periodical: Materials Science Forum (Volume 970)
• Pages: 107-114
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.970.107
• Online since: September 2019
• Authors: Pavel Baranov*, Andrey Kolomeitsev, Tamara G. Nesterenko
• Keywords: Analysis of Materials, Impact, Magnetometer, MEMS Fluxgate, Vibration

References

[1] Hava Can, Uğur Topal, Design of Ring Core Fluxgate Magnetometer as Attitude Control Sensor for Low and High Orbit Satellites, Journal of Superconductivity and Novel Magnetism 28(3) (2015) 1093-1096.

DOI: 10.1007/s10948-014-2788-5

[2] J.E. Lenz, A.S. Edelstein, Magnetic Sensors and Their Applications, IEEE Sensors Journal 6(3) (2006) 631-649.

DOI: 10.1109/jsen.2006.874493

[3] P. Ripka, Magnetic Sensors and Magnetometers, Artech house, Boston, (2000).

[4] P. Ripka, Advances in Magnetic Field Sensors, IEEE Sensors Journal 10(6) (2010) 1108-1116.

DOI: 10.1109/jsen.2010.2043429

[5] A. Baschirotto et. al., An Integrated Micro-Fluxgate Magnetic Sensor With Front-End Circuitry, IEEE Transactions On Instrumentation And Measurement 58(9) (2009) 3269-3275.

DOI: 10.1109/tim.2009.2022375

[6] A. Baschirotto, A 2D micro-fluxgate earth magnetic field measurement systems with fully automated acquisition setup, Measurement 43 (2010) 46-53.

DOI: 10.1016/j.measurement.2009.06.007

[7] J. Kubík, L. Pavel, P. Ripka, PCB racetrack fluxgate sensor with improved temperature stability, Sens. Act. A Phys. 130 (2006) 184-188.

DOI: 10.1016/j.sna.2005.12.027

[8] J. Kubik, L. Pavel, P. Ripka, P. Kaspar, Low-power printed circuit board fluxgate sensor, IEEE Sensors J. 7 (2007) 179–183.

DOI: 10.1109/jsen.2006.886998

[9] J. Kubik, L. Pavel, P. Ripka, P. Kaspar, Low-power PCB Fluxgate Sensor, IEEE Sensors. Proc. of the 4-th IEEE Conference on Sensors Irvine, CA, 2005, pp.432-435.

DOI: 10.1109/icsens.2005.1597728

[10] M. Woytasik, J.-P. Grandchamp, E. Dufour-Gergam, J.-P. Gilles, S. Megherbi, E. Martincic, H. Mathias, P. Crozat, Two- and three-dimensional microcoil fabrication process for three-axis magnetic sensors on flexible substrates, Sens. Act. A: Phys. 132 (2006) 2-7.

DOI: 10.1016/j.sna.2006.06.062

[11] C. Lei, R. Wang, Y. Zhou, Z.M. Zhou, MEMS micro fluxgate sensors with mutual vertical excitation coils and detection coils, MicrosystTechnol. 15(7) (2009) 969–972.

DOI: 10.1007/s00542-009-0847-9

[12] P.-M.Wu, C.H. Ahn, Design of a low-power micromachined fluxgate sensor using localized core saturation method, IEEE Sensors J. 8 (2008) 308-313.

DOI: 10.1109/jsen.2008.917490

[13] Jian Lei, Chong Lei, Tao Wang, Zhen Yang and Yong Zhou, A MEMS-fluxgate-based sensing system for the detection of Dynabeads, Journal of Micromechanics and Microengineering, 23 (2013).

DOI: 10.1088/0960-1317/23/9/095005

[14] Maren Ramona Kirchhoff, Stephanus Büttgenbach, MEMS fluxgate magnetometer for parallel robot application, Microsystem Technologies, 16 (2010) 787–790.

DOI: 10.1007/s00542-009-0985-0

[15] Jian Lei, Chong Lei, Yong Zhou, Fabrication and characterization of a new MEMS fluxgate sensor with nanocrystalline magnetic core, Measurement, 45 (2012) 535-540.

DOI: 10.1016/j.measurement.2011.10.013

[16] Jian Lei, Chong Lei, Yong Zhou, Analysis and comparison of the performance of MEMS fluxgate sensors with permalloy magnetic cores of different structures, Measurement, 46 (2013) 710-715.

DOI: 10.1016/j.measurement.2012.09.009