Reciprocal Space Map Measurement of Ceramics Thin Films for Unequal Lattice Change at High Temperature

Abstract:

Ceria and zirconia are very important for their thermal, mechanical, and chemical stability, and their thin films have attracted much attention for applications such as buffer layers for growing electric devices, thermal-shield or optical coatings, corrosion-resistant coatings, oxygen sensors and ionic conductors for fuel cells. To investigate and control the thin film orientation and phase is important to improve those performances. In this study, the reciprocal space maps of CeO₂/YSZ/Si(001) were obtained at high temperature by adding a heater to the sample stage. CeO₂ and YSZ thin films were epitaxially grown samples. By measuring lattice constants at high temperature, it was conducted that axes of CeO₂ and YSZ thin films parallel to the substrate surface showed smaller thermal coefficients than bulk reference and axes perpendicular to the surface showed larger thermal coefficients due to the underlayer and Si substrate. The distortion rate of the lattice of each film was small around at the film deposition temperature. And it could be controled the lattice parameter at the film surface by the film thickness. Therefore, when another thin film, for example, SrTiO₃ is deposited on the CeO₂ layer, the lattice change of CeO₂ with increasing temperature may differ from that before depositing the top layer.

• Periodical: Materials Science Forum (Volume 985)
• Pages: 218-222
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.985.218
• Online since: April 2020
• Authors: Atsushi Saiki, Shogo Miwa, Takashi Hashizume
• Keywords: Lattice Distortion, Reciprocal Space Maps, Thermal Coefficients, Thin Film

References

[1] J. Eichler, U. Eisele, J. Rodel, Mechanical Properties of Monoclinic Zirconia,, J. Am. Ceram. Soc., 87, 1401-1403 (2004).

DOI: 10.1111/j.1151-2916.2004.tb07748.x

[2] F. Bondioli, C. Leonelli, T. Manfredini, A. M. Ferrari, M.C. Caracoche, P. C. Rivas, A. M. Rodriguez, Microwave-Hydrothermal Synthesis and Hyperfine Characterization of Praseodymium-Doped Nanometric Zirconia Powders,, J. Am. Ceram. Soc., 88, 633-638(2005).

DOI: 10.1111/j.1551-2916.2005.00093.x

[3] O. Vasylkiv, Y. Sakka, Y. Maeda, V. V. Skorokhod, Sonochemical Preparation and Properties of Pt-2Y-TZP Nano-Composites,, J. Am. Ceram. Soc., 88, 639-644 (2005).

DOI: 10.1111/j.1551-2916.2005.00099.x

[4] K. Mukae, N. Mizutani, A. Saiki, X. Li, J. Nowotny, Z. Zhang, T. Bak, C.C. Sorrell, Effect of surface preparation of zirconia on its reactivity with oxygen,, J. Aust. Ceramic Soc., 34, 76-79 (1998).

[5] T. Kiguchi, A.Saiki, K.Shinozaki, K. Terayama, N.Mizutani, Effect of axial ratio on critical stress of ferroelastic domain switching in ceria­partially­stabilized zirconia,, J. Ceram. Soc. Japan, 105, 871~875 (1997).

DOI: 10.2109/jcersj.105.871

[6] G.R. Dickinson, C. Petorak, K. Bowman, R. W. Trice, Stress Relaxation of Compression Loaded Plasma-Sprayed 7 Wt% Y2O3-ZrO2 Stand-Alone Coatings,, J. Am. Ceram. Soc., 88, 2202-2208 (2005).

DOI: 10.1111/j.1551-2916.2005.00407.x

[7] N. Wu, Z. Chen, S.X. Mao, Hot Corrosion Mechanism of Composition Alumina/Yttria- Stabilized Zirconia Coating in Molten Sulfate-Vanadate Salt,, J. Am. Ceram. Soc., 88, 675-682 (2005).

DOI: 10.1111/j.1551-2916.2005.00120.x

[8] Y. Ohya, M. Murayama, Y. Takahashi, Electrical Properties of ZrO2 Thin Films Doped With In2O3 by Sol-Gel Method,, Key Engineering Materials, 169-170, 176-178 (1999).

DOI: 10.4028/www.scientific.net/kem.169-170.175

[9] K. Sasaki, L. J. Gauckler, Microstructure-Property Relations of SOFC Electrodes: Importance of Microstructural Optimization of La(Sr)MnO3 Cathodes on ZrO2(Y2O3) Electrolytes,, Key Engineering Materials, 169-170, 201-204 (1999).

DOI: 10.4028/www.scientific.net/kem.169-170.201

[10] A. Bastianini, G. A. Battiston, R. Gerbasi, M. Porchia, S. Daolio, J. Phys Ⅳ 5, 525-532. (1995).

[11] H. Wendel, H. Holzschuh, H. Suhr, G. Erker. S. Dehnicke, M. Mena, Mod. Phys. Lett. B 4, 1215-1217 (1990).

DOI: 10.1142/s0217984990001537

[12] N. Wakiya, K. Shinozaki, N. Mizutani, Improvement of magnetic properties of (111)-epitaxial nickel-zinc-ferrite thin films deposited on Si platform,, Key Engineering Materials, 269, 245-248 (2004).

DOI: 10.4028/www.scientific.net/kem.269.245

[13] C-H. Chen, N. Wakiya, A. Saiki, K. Shinozaki, N. Mizutani, Thickness and Roughness Analysis on YSZ/Si(001) Epitaxial Films with Ultra Thin SiO2 Interface by X-Ray Reflectivity,, Key Engineering Materials, 181-182, 121-124 (2000).

DOI: 10.4028/www.scientific.net/kem.181-182.121