Lateral Size of Self-Patterned Nanostructures Controlled by Multi-Step Deposition

Izabela Szafraniak; Dietrich Hesse; Marin Alexe

doi:10.4028/www.scientific.net/SSP.106.117

Paper Titles

Wavelength Tunable Random Laser
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Potential of Nano-Sized Rare Earth Fluorides in Optical Applications
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Luminescence of ZrO₂ Nanocrystals
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Additional Absorption in the Multiply Scattering Absorbing Media
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Lateral Size of Self-Patterned Nanostructures Controlled by Multi-Step Deposition
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Hydroxyapatite Growth on Glass/CdSe/SiO_x Nanostructures
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Spectroscopic Ellipsometry and Raman Studies on Sputtered TiO₂ Thin Films
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Formation of Thallium Sulphide Layers on Polyethylene (PE) Sulphurised in a Solution of Higher Polythionic Acid
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Polymer Matrix Composites with Particles of TiC Obtained by a Sol-Gel Method
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Lateral Size of Self-Patterned Nanostructures Controlled by Multi-Step Deposition

Abstract:

Self-patterning presents an appealing alternative to lithography for the production of arrays of nanoscale ferroelectric capacitors for use in high density non-volatile memory devices. Recently a self-patterning method, based on the use of the instability of ultrathin films during hightemperature treatments, was used to fabricate nanosized ferroelectrics. This paper reports the use of the method for the preparation of PZT nanoislands on different single crystalline substrates - SrTiO3, MgO and LaAlO3. Moreover, a multi-step deposition procedure in order to control lateral the dimension of the crystals was introduced. The nanostructures obtained were studied by atomic force microscopy, scanning electron microscopy and X-ray diffraction.