Influence of Metal Contamination in the Measurement of p-Type Cz Silicon Wafer Lifetime and Impact on the Oxide Growth

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Periodical:

Solid State Phenomena (Volumes 108-109)

Edited by:

B. Pichaud, A. Claverie, D. Alquier, H. Richter and M. Kittler

Pages:

297-302

DOI:

10.4028/www.scientific.net/SSP.108-109.297

Citation:

C. Bigot et al., "Influence of Metal Contamination in the Measurement of p-Type Cz Silicon Wafer Lifetime and Impact on the Oxide Growth", Solid State Phenomena, Vols. 108-109, pp. 297-302, 2005

Online since:

December 2005

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$35.00

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