Nanotube Encoders

Abstract:

Linear encoders for nanoscale position sensing based on vertical arrays of single multi-walled carbon nanotubes (MWNTs) are investigated from experimental, theoretical, and design perspectives. Vertically aligned single MWNTs are realized using a combination of e-beam lithography and plasma-enhanced chemical vapor deposition (PECVD) growth. Field emission properties of the array are investigated inside a scanning electron microscope (SEM) equipped with a 3-DOF nanorobotic manipulator with nanometer resolution functioning as a scanning anode. Lateral position of the scanning anode is sensed from the emission distribution. High resolution (best: 12.9 nm; practical: 38.0 nm) for lateral position sensing around an emitter has been realized.

• Periodical: Solid State Phenomena (Volumes 121-123)
• Pages: 1363-1366
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.121-123.1363
• Online since: March 2007
• Authors: L.X. Dong, A. Subramanian, Bradly J. Nelson, Y. Sun
• Keywords: Carbon Nanotube Array, Field Emission, Nano Encoder, Nanorobotic Manipulator, Scanning Anode

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