Carbon Nanotube Gas Sensor Fabricated on Anodic Aluminum Oxide

Abstract:

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A new type of gas sensor was realized by directly depositing carbon nanotube on nano channels of the anodic alumina oxide (AAO) fabricated on p-type silicon substrate. The carbon nanotubes were synthesized by thermal chemical vapor deposition at a very high temperature of 1200 oC to improve the crystallinity. The device fabrication process was also developed. The contact of carbon nanotubes and p-type Si substrate showed a Schottky behavior, and the Schottky barrier height increased with exposure to gases while the overall conductivity decreased. The sensors showed fast response and recovery to ammonia gas upon the filling (400 mTorr) and evacuation.

Info:

Periodical:

Solid State Phenomena (Volumes 124-126)

Edited by:

Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park

Pages:

1309-1312

DOI:

10.4028/www.scientific.net/SSP.124-126.1309

Citation:

N. D. Hoa et al., "Carbon Nanotube Gas Sensor Fabricated on Anodic Aluminum Oxide", Solid State Phenomena, Vols. 124-126, pp. 1309-1312, 2007

Online since:

June 2007

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Price:

$35.00

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