Carbon Nanotube Gas Sensor Fabricated on Anodic Aluminum Oxide

Nguyen Duc Hoa; Nguyen Van Quy; Gyu Seok Choi; You Suk Cho; Se Young Jeong; Do Jin Kim

doi:10.4028/www.scientific.net/SSP.124-126.1309

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HomeSolid State PhenomenaSolid State Phenomena Vols. 124-126Carbon Nanotube Gas Sensor Fabricated on Anodic...

Carbon Nanotube Gas Sensor Fabricated on Anodic Aluminum Oxide

Abstract:

A new type of gas sensor was realized by directly depositing carbon nanotube on nano channels of the anodic alumina oxide (AAO) fabricated on p-type silicon substrate. The carbon nanotubes were synthesized by thermal chemical vapor deposition at a very high temperature of 1200 oC to improve the crystallinity. The device fabrication process was also developed. The contact of carbon nanotubes and p-type Si substrate showed a Schottky behavior, and the Schottky barrier height increased with exposure to gases while the overall conductivity decreased. The sensors showed fast response and recovery to ammonia gas upon the filling (400 mTorr) and evacuation.

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Periodical:

Solid State Phenomena (Volumes 124-126)

Pages:

1309-1312

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.124-126.1309

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Online since:

June 2007

Authors:

Nguyen Duc Hoa, Nguyen Van Quy, Gyu Seok Choi, You Suk Cho, Se Young Jeong, Do Jin Kim

Keywords:

AAO, Carbon Nanotube (CN), Gas Sensor

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