The Reflectometry Studies on SiC and SiN Thin Layers

Małgorzata Karolus; Bożena Bierska-Piech; Eugeniusz Łągiewka

doi:10.4028/www.scientific.net/SSP.130.293

Paper Titles

SAXS Study of Selected Cationic Surfactant Influence on the DSPC-Based Model Phospholipid System
p.257

Temperature-Controlled Devitrification of Oxyfluoride Borate Glasses
p.263

X-Ray Diffraction Investigations of Crystallic Structure Changes in the Ni-Based Alloy at the Thermal Cycling
p.267

Structural Changes in New Rapidly-Quenched Finemet Type and Hitperm Type Alloys
p.273

Quantitative Phase Analysis of Fly Ashes from Six Polish Power Stations
p.277

Lattice and Peak Profile Parameters in GIXD Technique
p.281

The Structure Studies on Si-N Thin Layers
p.287

The Reflectometry Studies on SiC and SiN Thin Layers
p.293

Studies on Al₂O₃ - ZrO₂ Coatings Structure before and after Thermal Treatment
p.297

HomeSolid State PhenomenaSolid State Phenomena Vol. 130The Reflectometry Studies on SiC and SiN Thin...

The Reflectometry Studies on SiC and SiN Thin Layers

Abstract:

The X-ray reflectivity measurements were used for the analyses of the SiC and SiN thin layers. Density, roughness and the thickness were determined for searching materials. The calculations and simulations were carried out using the WinGixa software. The obtained results show that the studied layers are non-homogenous and there are consist of “sub-layers” rich in Si-C, Si-N, SI-O phases. Moreover, the presence of the main amorphous phase was observed in all searching samples.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Solid State Phenomena (Volume 130)

Pages:

293-296

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.130.293

Citation:

Cite this paper

Online since:

December 2007

Authors:

Małgorzata Karolus, Bożena Bierska-Piech, Eugeniusz Łągiewka

Keywords:

Density, Roughness, Thickness, X-Ray Reflectometry

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] H. Kiessig, Ann. Phys. 10 (1931) 769-778.

Google Scholar

[2] L.G. Parratt, Physical Review 95 (1954) 359-369.

Google Scholar

[3] T. Christ, F. Geffart, B. Glüsen, A. Kettner, G. Lüssem, O. Schäfer, V. Stümpflen, J. H. Wendorff, V.V. Tsukruk, Thin Solid Films 302 (1997) 214-222.

DOI: 10.1016/s0040-6090(96)09542-9

Google Scholar

[4] M. Tolan, Materials Science and Basic Research, Springer, Heidelberg, (1999).

Google Scholar

[5] D. Dane, A. Veldhuis, D. K. G. De Boer, A. J. G. Leenaers, L. M. C. Buydens, Physica B, 253 (1998) 254-268.

DOI: 10.1016/s0921-4526(98)00398-6

Google Scholar

[6] User's Giude - WinGixa, Philips Analytical (2000).

Google Scholar

[7] http: /www. hmi. de/bensc/instrumentation/instrumente/v6/refl/parratt_en. htm.

Google Scholar

[8] http: /www-llb. cea. fr/prism/programs/simulreflec/simulreflec. html.

Google Scholar

[9] B. Bierska-Piech, M. Wojciech, T. Goryczka, E. Łągiewka, Material Science 3 (2006) 342-345.

Google Scholar

[10] M. Karolus, E. Łągiewka, Solid State Phenomena, the same volumine.

Google Scholar