Acknowledgements
Committees and Sponsors
Photo
Preface
Direct Observation of Single Bubble Cavitation Damage for MHz Cleaning
p.3
p.3
High Speed Imaging of 1 MHz Driven Microbubbles in Contact with a Rigid Wall
p.7
p.7
Characterization of a Cavitation Bubble Structure at 230 kHz: Bubble Population, Sonoluminescence and Cleaning Potential
p.11
p.11
Impact of Megasonic Activation with Different Chemistries on Silicon Surface in Single Wafer Tool
p.15
p.15
Impacts of Ionization Potentials and Megasonic Dispersion
p.19
p.19
Preface
Abstract:
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Info:
Periodical:
Solid State Phenomena (Volumes 145-146)
Online since:
January 2009
Сopyright:
© 2009 Trans Tech Publications Ltd. All Rights Reserved
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