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HomeSolid State PhenomenaSolid State Phenomena Vols. 145-146Characterization of a Cavitation Bubble Structure...

Characterization of a Cavitation Bubble Structure at 230 kHz: Bubble Population, Sonoluminescence and Cleaning Potential

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Ultra Clean Processing of Semiconductor Surfaces IX

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Periodical:

Solid State Phenomena (Volumes 145-146)

Pages:

11-13

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.145-146.11

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Online since:

January 2009

Authors:

Andrea Otto, Till Nowak, Robert Mettin, Frank Holsteyns, Alexander Lippert

Keywords:

Bubble, Cavitation, Cleaning, Sonoluminescence, Ultrasound (US)

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© 2009 Trans Tech Publications Ltd. All Rights Reserved

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