Megasonic Sweeping and Silicon Wafer Cleaning

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Periodical:

Solid State Phenomena (Volumes 145-146)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

27-30

DOI:

10.4028/www.scientific.net/SSP.145-146.27

Citation:

J.M. Goodson and R. Nagarajan, "Megasonic Sweeping and Silicon Wafer Cleaning", Solid State Phenomena, Vols. 145-146, pp. 27-30, 2009

Online since:

January 2009

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Price:

$35.00

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