Design of a Low-Cost Submicron Measuring Probe

Gyula Hermann

doi:10.4028/www.scientific.net/SSP.164.195

Paper Titles

Control Method for Elimination of Self–Excited Oscillations during Turning
p.171

Stewart Platform Model with Uncertain Parameters
p.177

Port-Based Modeling of Distributed-Lumped Parameter Systems
p.183

Modal Reduction and Analysis of Gyroscopic Systems
p.189

Design of a Low-Cost Submicron Measuring Probe
p.195

Adaptation of the Expert System in Diagnosis of the Connection of the PLC User Interface System and A Field Level
p.201

Monitoring of Velocity of Manufacturing Machines Subassemblies by Means of a DAQ System
p.207

Virtual Prototyping Process Supported by New Diagnostic Method -Method of Metal Magnetic Memory
p.212

Phase Locked Loop Integrated System
p.221

HomeSolid State PhenomenaSolid State Phenomena Vol. 164Design of a Low-Cost Submicron Measuring Probe

Design of a Low-Cost Submicron Measuring Probe

Abstract:

The paper presents a new low-cost probe design. The moving element of the probe head consists of the stylus and a cross-form intermediate body with a small aluminium enhanced mirror at the two ends and at the center. The intermediate body is suspended on four springs made of beryllium-copper foils. The displacement of the probe tip is calculated from the displacement and the rotations of the mirrors measured by commercially available modified optical pick-ups.

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Periodical:

Solid State Phenomena (Volume 164)

Pages:

195-200

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.164.195

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Online since:

June 2010

Authors:

Gyula Hermann

Keywords:

Measuring Probe, Optical Displacement Sensing, Submicron Resolution

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