Design of a Low-Cost Submicron Measuring Probe

Abstract:

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The paper presents a new low-cost probe design. The moving element of the probe head consists of the stylus and a cross-form intermediate body with a small aluminium enhanced mirror at the two ends and at the center. The intermediate body is suspended on four springs made of beryllium-copper foils. The displacement of the probe tip is calculated from the displacement and the rotations of the mirrors measured by commercially available modified optical pick-ups.

Info:

Periodical:

Solid State Phenomena (Volume 164)

Edited by:

Andrejus H. Marcinkevičius and Algirdas V.Valiulis

Pages:

195-200

DOI:

10.4028/www.scientific.net/SSP.164.195

Citation:

G. Hermann "Design of a Low-Cost Submicron Measuring Probe", Solid State Phenomena, Vol. 164, pp. 195-200, 2010

Online since:

June 2010

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$35.00

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