Design of a Low-Cost Submicron Measuring Probe
The paper presents a new low-cost probe design. The moving element of the probe head consists of the stylus and a cross-form intermediate body with a small aluminium enhanced mirror at the two ends and at the center. The intermediate body is suspended on four springs made of beryllium-copper foils. The displacement of the probe tip is calculated from the displacement and the rotations of the mirrors measured by commercially available modified optical pick-ups.
Andrejus H. Marcinkevičius and Algirdas V.Valiulis
G. Hermann "Design of a Low-Cost Submicron Measuring Probe", Solid State Phenomena, Vol. 164, pp. 195-200, 2010