Effect of Rotating Speed on Properties of Antireflective Coatings

Abstract:

Sol-gel thin films prepared by rotating coating technique, sol–gel derived bulk was prepared from constant water (H₂O)/tetraethyl-orthosilicate (TEOS) ratio, rotating coating was carried out at different rotating speed 1000r/min (high speed) and 800r/min (low speed), 1500r/min (high speed) and 800r/min (low speed),2000r/min (high speed) and 800r/min (low speed),2500r/min (high speed) and 800r/min (low speed) respectively. The films were characterized by ellipsometer and SEM respectively. The experimental results show the thickness and refractive index of films are become smaller and smaller with the rotating speeds increasing.

• Periodical: Solid State Phenomena (Volumes 181-182)
• Pages: 443-446
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.181-182.443
• Online since: November 2011
• Authors: Rui Min Jin, Xin Feng Guo, Zhi Duan Cai, Li Min Cang, Yan Tao, Xiang Ju Han
• Keywords: Antireflective Coating, Rotating Speed, Sol-Gel (SG), Tetraethyl-Orthosilicate

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