Indium Tin Oxide Films Grown at Room Temperature by RF-Magnetron Sputtering in Oxygen-Free Environment

Dmitry Kudryashov; Alexander Gudovskikh; Kirill Zelentsov

doi:10.4028/www.scientific.net/SSP.200.10

Paper Titles

Preface and Committees

Some Properties of Thin Film Structures on the Base of ZnO Obtained by MOCVD Method
p.3

Indium Tin Oxide Films Grown at Room Temperature by RF-Magnetron Sputtering in Oxygen-Free Environment
p.10

Optical and Electrical Properties of ZnO Thin Films Grown by Sol-Gel Method
p.14

Raman and Impedance Spectroscopy of Blend Polycarbonate and Zinc Oxide Layers Grown by Sol-Gel Method
p.22

Admittance and Photoadmittance Spectroscopy of Zinc Oxide Layers Grown on p-Si Substrates by Spin Coating Method
p.27

Synthesis, Structure and Luminescence Properties of Rare-Earth Double Phosphates
p.33

Organic–Inorganic Hybrid Materials Doped with Eu^3+, Tb³⁺, La³⁺ and Lithium Ions
p.38

Carbazole Derivative Based Near Ultraviolet Organic Light Emitting Diode with ZnMgO:Al Anode Layer
p.45

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Indium Tin Oxide Films Grown at Room Temperature by RF-Magnetron Sputtering in Oxygen-Free Environment

Abstract:

Indium Tin Oxide (ITO) thin films were grown at room temperature (RT) in oxygen-free environment by rf-magnetron sputtering on glass and Si(100)-substrates. The effects of argon pressure, sputtering power and film thickness on the electrical and optical properties of ITO films were investigated. For a 100 nm thick ITO films grown at RT in argon pressure 1.95∙10^-3 mbar and sputtering power of 50 W, the transmittance was near 90% at 500 nm and resistivity was 5.4∙10^-4 Ohm∙cm. It has been shown that the sputtering power plays an important role in electric properties of ITO films. SEM images of these samples show smooth surface with sharp substrate/ITO interface.

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Periodical:

Solid State Phenomena (Volume 200)

Pages:

10-13

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.200.10

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Online since:

April 2013

Authors:

Dmitry Kudryashov, Alexander Gudovskikh, Kirill Zelentsov

Keywords:

Indium Tin Oxide (ITO), Oxygen-Free, RF Magnetron Sputtering, SEM, Transmittance

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References

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