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HRTEM and LACBED of Zigzag Boundaries in GaN Epilayers
Abstract:
Defects recognition in GaN epilayers was performed using HRTEM and LACBED images. Edge type dislocations, basal plane and prismatic stacking faults were determined from HRTEM analysis. Stacking mismatch boundaries on zigzag steps were found and examined using LACBED patterns in bright and dark field. For stacking faults Bragg lines split into a main and a subsidiary line. The fault plane and displacement vector can be identified from trace analysis performed on LACBED patterns.
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24-27
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June 2013
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© 2013 Trans Tech Publications Ltd. All Rights Reserved
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