Resonant Reflectance in Silicon Nanorods Arrays

Abstract:

The optical properties of ordered arrays of silicon nanorods (Si NRs) were investigated. Electron Beam Lithography followed by Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) was used for Si NRs fabrication. Si NRs were chemically and electrically passivated through the deposition of TiONx nanolayer. Tunable color generation from vertical silicon nanorods is demonstrated too.

• Periodical: Solid State Phenomena (Volume 245)
• Pages: 8-13
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.245.8
• Online since: October 2015
• Authors: Lyudmila S. Golobokova*, Yuri V. Nastaushev, Alexander B. Talochkin, T.A. Gavrilova, Fedor N. Dultsev, Alexander Vasilevich Latyshev
• Keywords: Nanorod, Reflectance, Silicon Nanostructures

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