Evaluation of Wear Rate of Nanocrystalline Diamond Films Using Abbott Curve

Andrei Bogatov; Vitali Podgursky

doi:10.4028/www.scientific.net/SSP.267.185

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HomeSolid State PhenomenaSolid State Phenomena Vol. 267Evaluation of Wear Rate of Nanocrystalline Diamond...

Evaluation of Wear Rate of Nanocrystalline Diamond Films Using Abbott Curve

Abstract:

The nanocrystalline diamond films were deposited by microwave plasma enhanced chemical vapour deposition (PE-CVD) on Si (100) substrate. Reciprocating sliding tests were conducted using Si₃N₄ balls as a counter body. A method based on the construction of the Abbott curve representing the areas of pristine and worn surface in the wear scars was applied for estimation of the wear rate. The calculated wear rates were compared with the results obtained by profilometric measurements and direct measurement of the wear scars cross sections by scanning electron microscopy (SEM).

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Periodical:

Solid State Phenomena (Volume 267)

Pages:

185-189

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.267.185

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Online since:

October 2017

Authors:

Andrei Bogatov*, Vitali Podgursky

Keywords:

NCD, Profilometry, Wear Measurement

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