Detection of Threading Dislocations by EBIC in a SiGe Epilayer with Graded Buffer

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Periodical:

Solid State Phenomena (Volumes 32-33)

Edited by:

H.G. Grimmeiss, M. Kittler and H. Richter

Pages:

559-564

DOI:

10.4028/www.scientific.net/SSP.32-33.559

Citation:

M. Kittler et al., "Detection of Threading Dislocations by EBIC in a SiGe Epilayer with Graded Buffer", Solid State Phenomena, Vols. 32-33, pp. 559-564, 1993

Online since:

December 1993

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$35.00

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