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Determination of Superlattice Structural Parameters in Mismatched Epitaxial Structures
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HomeSolid State PhenomenaSolid State Phenomena Vols. 32-33Investigation of Strain in Si1-xGex/Si...

Investigation of Strain in Si_1-xGe_x/Si Heterostructures and Local Isolation Structures by Convergent Beam Electron Diffraction

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Gettering and Defect Engineering in Semiconductor Technology V

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Periodical:

Solid State Phenomena (Volumes 32-33)

Pages:

547-552

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.32-33.547

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Online since:

December 1993

Authors:

Aldo Armigliato, R. Balboni, S. Frabboni, Jan Vanhellemont

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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