Fluid Simulation over a Rotating Disk: Momentum and Mass Transfer across the Wafer Boundary

Naser Belmiloud; Masanobu Sato; Yasutoshi Okuno

doi:10.4028/p-7hsyuJ

Paper Titles

Chemical Identification of Sub-20 nm Defects and Sub-Monolayer Residues with Nano IR PiFM
p.204

Development of Intentional Contamination in Iron by Bath for Silicon Wafers and Evaluation of VPD-Bulk and LPD-Bulk for Metallic Contaminants Analyses by ICPMS
p.210

Defect Mapping and Densification in Self-Assembled Monolayers of Octadecyltrichlorosilane on SiO₂
p.216

Fine Edge and Bevel Film Cut Accuracy by a Novel and High Precision Wafer Centering System
p.222

Fluid Simulation over a Rotating Disk: Momentum and Mass Transfer across the Wafer Boundary
p.231

Etch Profile Prediction Model Using Convolutional Neural Network
p.236

ESD Prevention Technology for Two-Fluid Pure Water Spray Cleaning with Controlled Electrostatic Charge
p.244

Parametric Studies on Particle Removal and Erosion in Nozzle Injection Megasonic Cleaning
p.253

Optimal Injection Distance in Ultrasonic Water Flow Cleaning
p.258

HomeSolid State PhenomenaSolid State Phenomena Vol. 346Fluid Simulation over a Rotating Disk: Momentum...

Fluid Simulation over a Rotating Disk: Momentum and Mass Transfer across the Wafer Boundary

Abstract:

This research focuses on the crucial task of identifying the viscous sublayer in improving wet cleaning processes. Computational fluid dynamics (CFD) is employed to manipulate fluid properties and process parameters for optimizing cleaning efficiency. The research findings encompass the evolution of thickness across the wafer radius, characterization of the wavy air-liquid interface, velocity profile within the liquid, and measurement of the viscous sublayer's thickness. Key findings highlight the significance of small-scale turbulent structures, the competition between Coriolis and viscous forces, and the successful utilization of CFD LES (Large Eddy Simulation) for quantifying and visualizing the viscous sublayer and eddy flow.

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Periodical:

Solid State Phenomena (Volume 346)

Pages:

231-235

DOI:

https://doi.org/10.4028/p-7hsyuJ

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Online since:

August 2023

Authors:

Naser Belmiloud*, Masanobu Sato, Yasutoshi Okuno

Keywords:

LES, Rotating Disk, Thin Film, Turbulences, Viscous Sublayer

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* - Corresponding Author

References

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