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HomeSolid State PhenomenaSolid State Phenomena Vols. 44-46The Influence of Chemical Annealing on the...

The Influence of Chemical Annealing on the Electronic Surface Properties of Amorphous Silicon

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Hydrogenated Amorphous Silicon

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Periodical:

Solid State Phenomena (Volumes 44-46)

Pages:

775-790

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.44-46.775

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Online since:

July 1995

Authors:

Jürgen Ristein, C. Appelt, T. Gertkemper, Lothar Ley

Keywords:

Chemical Annealing, Deposition Process, Equilibration, Near-Surface Defects, Surface Hydrogen

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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