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HomeSolid State PhenomenaSolid State Phenomena Vols. 44-46

Solid State Phenomena Vols. 44-46

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.44-46

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Table of Contents

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Paper Title Page

Preface

Selected Properties of Hydrogenated Amorphous Silicon and Silicon-Carbon Alloys

Authors: F. Alvarez, L.R. Tessler

3

On the Atomic Structure of Amorphous Semiconductors

Authors: L. Pusztai

25

Physics of Device Grade Amorphous Silicon

Authors: R.M. Mehra, P.C. Mathur, P. Craig Taylor

41

Very High Frequency Glow Discharge: Plasma- and Deposition Aspects

Authors: H. Keppner, U. Kroll, J. Meier, A. Shah

97

Hydrogen-Plasma Treated CVD Amorphous Silicon: Growth and Properties

Authors: I. Sakata, Mitsugu Yamanaka, Toshihiro Sekigawa, Yoshikazu Hayashi

127

Growth of Hydrogenated Amorphous Silicon in Electron Cyclotron Resonance Plasma

Authors: M. Zhang, Yukihiro Nakayama

135

Diagnostics of High-Rate a-Si:H Deposition in a Variable Frequency Plasma

Authors: M. Heintze

181

Ellipsometric Studies of a-Si:H Film Growth, Density and Microstructure

Authors: U.I. Schmidt, T. Haage, B. Schröder

195

Plasma Kinetics, Surface Phenomena and Growth Mechanism in Hydrogenated Amorphous Silicon: Transition from Amorphous to Micro- and Nano-Crystalline Si:H

Authors: D. Das

227

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