Growth of Hydrogenated Amorphous Silicon in Electron Cyclotron Resonance Plasma

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Periodical:

Solid State Phenomena (Volumes 44-46)

Edited by:

Hans Neber-Aeschbacher

Pages:

135-180

DOI:

10.4028/www.scientific.net/SSP.44-46.135

Citation:

M. Zhang and Y. Nakayama, "Growth of Hydrogenated Amorphous Silicon in Electron Cyclotron Resonance Plasma", Solid State Phenomena, Vols. 44-46, pp. 135-180, 1995

Online since:

July 1995

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$35.00

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