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HomeSolid State PhenomenaSolid State Phenomena Vols. 44-46Very High Frequency Glow Discharge: Plasma- and...

Very High Frequency Glow Discharge: Plasma- and Deposition Aspects

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Hydrogenated Amorphous Silicon

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Periodical:

Solid State Phenomena (Volumes 44-46)

Pages:

97-126

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.44-46.97

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Online since:

July 1995

Authors:

H. Keppner, U. Kroll, J. Meier, A. Shah

Keywords:

Glow-Discharge GD, Plasma Deposition, Plasma Enhanced Chemical Vapour Deposition, Plasma Impedance, Sheath, VHF-Glow Discharge

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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