Very High Frequency Glow Discharge: Plasma- and Deposition Aspects

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Periodical:

Solid State Phenomena (Volumes 44-46)

Edited by:

Hans Neber-Aeschbacher

Pages:

97-126

DOI:

10.4028/www.scientific.net/SSP.44-46.97

Citation:

H. Keppner et al., "Very High Frequency Glow Discharge: Plasma- and Deposition Aspects", Solid State Phenomena, Vols. 44-46, pp. 97-126, 1995

Online since:

July 1995

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$35.00

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