Plasma Kinetics, Surface Phenomena and Growth Mechanism in Hydrogenated Amorphous Silicon: Transition from Amorphous to Micro- and Nano-Crystalline Si:H

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Periodical:

Solid State Phenomena (Volumes 44-46)

Edited by:

Hans Neber-Aeschbacher

Pages:

227-260

DOI:

10.4028/www.scientific.net/SSP.44-46.227

Citation:

D. Das "Plasma Kinetics, Surface Phenomena and Growth Mechanism in Hydrogenated Amorphous Silicon: Transition from Amorphous to Micro- and Nano-Crystalline Si:H", Solid State Phenomena, Vols. 44-46, pp. 227-260, 1995

Online since:

July 1995

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$35.00

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