Diagnostics of High-Rate a-Si:H Deposition in a Variable Frequency Plasma
p.181
p.181
Ellipsometric Studies of a-Si:H Film Growth, Density and Microstructure
p.195
p.195
Plasma Kinetics, Surface Phenomena and Growth Mechanism in Hydrogenated Amorphous Silicon: Transition from Amorphous to Micro- and Nano-Crystalline Si:H
p.227
p.227
Luminescence of Porous and Amorphous Hydrogenated Silicon: Analogies and Differences
p.261
p.261
Electric Field Dependence of Photoluminescence in a-Si:H
p.275
p.275
Visible Light Emission at Room Temperature from PECVD a-SiOx:H
p.283
p.283
The Lifetimes of High-Frequency Phonons in Amorphous Silicon: Evidence for Phonon Localization
p.289
p.289
Wide Band Gap Microcrystalline Silicon Thin Films
p.299
p.299
Reactive Ion Etching Characterization of a-Si:H and a-SiC:H Thin Films
p.347
p.347
Electric Field Dependence of Photoluminescence in a-Si:H
Abstract:
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Periodical:
Solid State Phenomena (Volumes 44-46)
Pages:
275-282
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Online since:
July 1995
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© 1995 Trans Tech Publications Ltd. All Rights Reserved
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